Tert-butylimido tris(ethylmethylamido) niobium    (TBTEMN)

SDS

Product Number: 0027

CAS Number: 864150-47-0

Molecular Weight: 338.34

Molecular Formula: C₁₃H­₃₃N₄Nb

Properties:

• Appearance: pale yellow liquid
• Boiling Point: 86-87 °C @ 1.5 torr
• Vapor pressure: 1 torr @ 78 °C

Purity by NMR: 98.0% minimum

Purity by ICP: 99.99% minimum

Applications:

NbN, NbO_x layers deposition.

Packaging:

Glass bottle, Stainless steel cylinder