Hexachlorodisilane (HCDS)
Applications: Si, SiO2 layer deposition by CVD or ALD
1,2-Bis(diisopropylamino)disilane (BDIPADS)
Applications: Best precursor for low-temperature SiO2 ALD
Bis(diethylamino)silane (BDEAS)
Applications: SiO2, SiN, SiON, hafnium-silicon oxides deposition
Tris(tert-pentoxy)silanol (TPOSOL)
Applications: SiO2 ALD
