Tris(trichlorosilyl)silane    (3TCSS)

SDS

Product Number: 0036

CAS Number: 62257-60-7

Molecular Weight: 432.43

Molecular Formula: Cl₉HSi₄

Properties:

• Appearance: White solid or colorless liquid
• Density: 1.539 g/mL
• Melting Point: 30 °C
• Boiling Point: 60-62 °C at 0.2 torr
• Vapor pressure: 1 torr @ 75 °C

Purity by GC: 99.0% minimum

Purity by ICP: 99.999% minimum

Applications:

Si, SiO₂, SiN deposition