Tris(dimethylamino)silane    (3DMAS)

 

structures/Tris(dimethylamino)silane (3DMAS).png


Product Number: 0016

CAS Number: 15112-89-7

Molecular Weight: 161.32

Molecular Formula: C6H19N3Si

 

Properties:

  • Boiling Point: 142 - 145 °C (lit.) 
  • Melting Point: -90 °C (lit.)
  • Density: 0.850 g/mL at 20 °C (lit.)
  • Appearance: Colorless liquid
  • Vapor pressure: 13 Torr @ 36 °C

 

Purity by GC: 99.5 %, minimum

Purity by ICP: 99.999 %, minimum

 

Applications:

Silicon nitride deposition, hydrosilylation of olefins

 

 

For inquiries regarding Tris(dimethylamino)silane, please complete this form