Tert-butylimido tris(diethylamido) niobium    (TBTDEN)

SDS

Product Number: 0026

CAS Number: 169896-41-7

Molecular Weight: 380.41

Molecular Formula: C₁₆H­₃₉N₄Nb

Properties:

• Appearance: pale yellow liquid
• Boiling Point: 108-109 °C @ 1.5 torr
• Vapor pressure: 1 torr @ 91 °C
• Density: 1.015 g/mL at 25 °C (lit.)

Purity by NMR: 98.0% minimum

Purity by ICP: 99.99% minimum

Applications:

NbN, NbO_x layers deposition.

Packaging:

Glass bottle, Stainless steel cylinder