Tert-butylimido tris(diethylamido) tantalum    (TBTDET)

SDS

Product Number: 0011

CAS Number: 169896-41-7

Molecular Weight: 468.47

Molecular Formula: C₁₆H­₃₉N₄Ta

Properties:

• Boiling Point: 95 °C @ 0.5 torr (lit.) 
• Density: 1.252 g/mL at 25 °C 
• Appearance: Pale yellow liquid

Purity by NMR: 98.0% minimum

Purity by ICP: 99.999% minimum

Applications:

Atomic layer deposition