Bis(ethylmethylamino)silane    (BEMAS)

SDS

Product Number: 0019

CAS Number: 1011514-41-2

Molecular Weight: 146.31

Molecular Formula: C₆H₁₈N₂Si

Properties:

• Boiling Point: 134 °C (lit.)
• Density: 0.8 g/mL at 25 °C
• Purity by GC: 99.0% minimum
• Purity by ICP/MS: 99.999%
• Appearance: colorless liquid

Applications: 

Atomic Layer Deposition.