Tetrakis(trichlorosilyl)silane (4TCSS)
silane (4TCSS).png)
Product Information
Product Number
0014
CAS Number
50350-62-4
Molecular Weight
565.87
Molecular Formula
Cl12Si5
Properties
Boiling Point
190 °C at 15 Torr (sub.)
Melting Point
55 °C
Appearance
White solid
Vapor Pressure, 25°C
<0.1 mm
Purity by GC
98.0% minimum
Purity by %Cl
98.0% minimum (optional)
Applications
Silicon deposition